Handbook of Microlithography, Micromachining, and Microfabrication : Microlithography /
Gorde:
| Egile nagusia: | |
|---|---|
| Formatua: | Liburua |
| Hizkuntza: | ingelesa |
| Argitaratua: |
Bellingham, EUA : Londres, Inglaterra :
SPIE Optical Engineering ; Institution of Electrical Engineers,
1997, c1997
|
| Saila: | (IEE Materiales and Devices Series ;
12) (SPIE Press Monograph ; PM39) |
| Gaiak: | |
| Etiketak: |
Etiketarik gabe, Izan zaitez lehena erregistro honi etiketa jartzen!
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MARC
| LEADER | 00000nam^a2200000^a^4500 | ||
|---|---|---|---|
| 001 | 000174537 | ||
| 005 | 20250521000000.0 | ||
| 009 | 20260310101533.117 | ||
| 020 | |a 0-8194-2378-5 | ||
| 037 | |a Acervo ITESO - Biblioteca | ||
| 041 | |a ING | ||
| 082 | |a 670. |b RAI V. 1 | ||
| 100 | |a Rai-Choudhury, P. |e (ed.) | ||
| 245 | 1 | 0 | |a Handbook of Microlithography, Micromachining, and Microfabrication : |b Microlithography / |c Ed. de P. Rai-Choudhury. |
| 264 | 4 | |a Bellingham, EUA : |b SPIE Optical Engineering ; |a Londres, Inglaterra : |b Institution of Electrical Engineers, |c 1997, c1997 | |
| 300 | |a VIII, 768 p. | ||
| 336 | |a texto |b txt |2 rdacontenido | ||
| 337 | |a sin mediación |b n |2 rdamedio | ||
| 338 | |a volumen |b nc |2 rdasoporte | ||
| 440 | 1 | |a (IEE Materiales and Devices Series ; |v 12) | |
| 440 | 1 | |a (SPIE Press Monograph ; |v PM39) | |
| 649 | |a XX | ||
| 650 | |a Litografía | ||
| 650 | |a Fotolitografía | ||
| 650 | |a Haces Electrónicos | ||
| 650 | |a Microtecnología | ||
| 650 | |a Industria Electrónica | ||
| 650 | |a Microelectrónica | ||
| 910 | |a Fondo General | ||
| 920 | |a Impresos - Libros | ||
| 930 | |a Colección General | ||
| 905 | |a 101 | ||
| 901 | |a 0500112591 |b IT1 |c ACC |u 20250521 | ||
| 901 | |a 0500112617 |b IT1 |c ACC |u 20250521 | ||
| 902 | |a https://opac.biblio.iteso.mx/vufind/Record/000174537 | ||