Chemical Physics of Thin Film Deposition Processes for Micro- and Nano-Technologies /
Guardado en:
| Institution som forfatter: | |
|---|---|
| Andre forfattere: | |
| Format: | Procedimiento de la conferencia Bog |
| Sprog: | engelsk |
| Udgivet: |
Dordrecht, Holanda :
Kluwer,
2002, c2002
|
| Serier: | (NATO Science. Series II : Mathematics, Physics and Chemistry ;
55) |
| Fag: | |
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MARC
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| 037 | |a Acervo ITESO - Biblioteca | ||
| 041 | |a ING | ||
| 082 | |a 620. 5 |b NAT 2001 | ||
| 111 | |a NATO Advanced Study Institute [Course] on Chemical Physics of Thin Film Deposition Processes for Micro- and Nano-Technologies ( |d 2001 : |c Organización del Tratado del Atlántico Norte) | ||
| 245 | 1 | 0 | |a Chemical Physics of Thin Film Deposition Processes for Micro- and Nano-Technologies / |c Ed. y pref. de Y. Pauleau. |
| 264 | 4 | |a Dordrecht, Holanda : |b Kluwer, |c 2002, c2002 | |
| 300 | |a XIII, 363 p. | ||
| 336 | |a texto |b txt |2 rdacontenido | ||
| 337 | |a sin mediación |b n |2 rdamedio | ||
| 338 | |a volumen |b nc |2 rdasoporte | ||
| 440 | 1 | |a (NATO Science. |p Series II : Mathematics, Physics and Chemistry ; |v 55) | |
| 649 | |a XX | ||
| 650 | |a Nanotecnología - |x Congresos - |x Tema Principal | ||
| 650 | |a Microtecnología - |x Congresos | ||
| 650 | |a Películas Delgadas | ||
| 650 | |a Fenómenos Superficiales | ||
| 650 | |a Superficies (Física) | ||
| 650 | |a Física Nuclear | ||
| 650 | |a Fisicoquímica | ||
| 650 | |a Ingeniería | ||
| 700 | |a Pauleau, Yves |e (edición) | ||
| 910 | |a Fondo General | ||
| 920 | |a Impresos - Libros | ||
| 930 | |a Colección General | ||
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| 901 | |a 0500079315 |b IT1 |c ACC |u 20250521 | ||
| 902 | |a https://opac.biblio.iteso.mx/vufind/Record/000149912 | ||