Electroceramic-Based MEMS Fabrication-Technology and Applications Setter, Nava creator (ed.) text monographic ING XII, 414 p. Ed. de N. Setter. XX Sistemas Microelectromecánicos Transductores Sensores Circuitos Integrados Microtecnología Microelectrónica Piezoelectricidad Ingeniería Electrónica 621. 381 SET (Electronic Materials: Science and Technology) 0-387-23310-5 Acervo ITESO - Biblioteca 20260624000000.0 000183285