Eitemau Tebyg: MEMS :
- MEMS : Design and Fabrication /
- Handbook of Sensors and Actuators : Micro Mechanical Systems : Principles and Technology /
- Electroceramic-Based MEMS : Fabrication-Technology and Applications /
- MEMS Mechanical Sensors /
- MEMS : Introduction and Fundamentals /
- RF MEMS Circuit Design for Wireless Communications /